2Z-HVS 2 zone high vacuum sealer with getter activation
Compact high vacuum thermal processing furnace used for MEMS package sealing, with getter activation and very high reliability, automatically controlled by linear motion stage to provide component separation during thermal processing in 2 temperature zones
Technical Data
Heated Area each with Ø 100 mm and 6 component adaptors
Chamber height 100 mm
Temperature range bottom heater: up to 400 °C, top heater: up to 200 °C
(bottom heater optional up to 600 °C)
Ramp up rate 20 K/min
Ramp down rate 10 K/min
Vacuum up to 10-6 mbar
Interface USB
Controller HVS-2604 (20 programs storable, each with 100 steps)
Dimension 200 x 500 x 470 mm (WxHxD)
Weight 23,5 kg
Voltage 230 V AC
Frequency 50-60 Hz
Current max. 10 A
Power 2,3 kW
Options
HVS-HV Turbomolecular Pump for vacuum up to 10-6 mbar
HVS-TC Additional thermocouple to measure on device
HVS-WC Closed loop water cooling system
Available downloads:
(Please right-click on the link and choose "Save target as...")
