PTP-300

Universal temperature and plasma cleaning machine with maximum part loading area: 309mmx319mm (35mm max. part height)

Applications:

Technical Data PTP-300:

Loading area:	309mmx319mmx35mm (process area)
Chamber height:	35 mm
Chamber material:	aluminium / quartz
Chamber material (optional):	Aluminium or quartz glass process chamber (size: 305x305x26mm)
Dimension outside:	600mmx1850x880 mm (WxDxH)
Chamber:	integrated gas inlet / 2 gas lines are standard
Gas lines:	2 Mass Flow Controllers
Vacuum:	DN25 KF vacuum flange
Heating:	24 infrared lamps (total 18kW)
Process control by:	SPS Controller PP420 (B&R) with LCD display
Maintenance:	Ethernet
Microwave generator:	for plasma cleaning or removal of oxyde resists 2,45 GHz, max. 600 Watts stepless from 100 Watts to 600 Watts
Cooling:	water cooling required (water cooler optional)
Power:	3/N/PE; AC; 50/60 Hz; 230/400V
Weight:	150-200kg (depends on acessories)

Options and accessories:

PTP-AL	Automatic Loading
PTP-MFC	Mass Flow Controller
PTP-RPP	Double stage rotary vane pump for vacuum up to 10-3 mbar (torr)
PTP-HVP	Turbomolecular pump with valve and Pirani gauge for vacuum up to 10-6 mbar (torr)
PTP-WC	Closed loop water cooling system

Available downloads:
(Please right-click on the link and choose "Save target as...")

General Information about Plasma technology	plasmageneral.pdf (681 KB)
Typical Plasma applications	plasmatypical.pdf (44 KB)
PTP	ptp.PDF (228 KB)