
|
HPH-300 Hot chuck for 300mm wafer
This heated work holder allows the heat treatment from3" wafer size up to 12" (300mm) wafer size.The heated work stage is available with or without quartz lift pins.
|
|

|
HPP-155-L
Programmable Hot Plate with lift pins with vacuum hold for 3" up to 6" wafer size wafer size or 150 x 150 mm substrate size.
|
|