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Plasma Cleaning & Heat
 
High vacuum sealer for MEMS


2Z-HVS-100 2 zone high vacuum sealer with getter activation

2Z-HVS-200 2 zone high vacuum sealer with getter activation
 
Rapid Thermal Process Ovens
 
Reflow Solder Systems
 
Hot chucks with external controller
 
Hot plates with Lift Pins
 
Hot Plates with integrated controller
 
Die Bonder
 
Wire Bonder
 
Wafer scriber manual
 
Wire bond tools
 

High vacuum sealer for MEMS

  Model Heated/solder area  Tmax °C ramp up rate ramp down rate specials

2Z-HVS-100 2 zone high vacuum sealer with getter activation
 100 mm for 6 adapters 450 °C 35 K/min 25 K/min customer specific adapters possible

2Z-HVS-200 2 zone high vacuum sealer with getter activation
 200 mm for 6 adapters 450 °C 20 K/min 20 K/min customer specific adapters possible
© 2007-2012 UniTemp GmbH · Last Update: 17.04.2012 · 6 User online